CVD Tube Furnace With 3 channel Gas Float Meters

Product Overview for 1700C CVD Tube Furnace

1700C series Gas controlled CVD tube furnace features intergrate two or three gas channels, mixed gas controlled system, high alumina ceramic tube with SS304 sealing flanges, heated by MoSi2 rods, Tmax 1700 degree C (1500C under high vacuum level). Microprocessor-based self-tuning PID provides excellent control with no overshooting and +/- 1 °C accuracy. Max vacuum level could be reached to 10E-3 torr with molecular vacuum pump. 

Main Features

• Tmax 1700 °C
• Electric heated, two heating zones, high temperature, vacuum tube furnace
• Dual steel structure, non-Split furnace chamber to protect minium heat loss
• Multiple atmosphere processes in a single cycle are available
• Max Vacuum level achieve 10E-3 torr worked with molecular pump
• Fiber-insulated chamber with powerful MoSi2 heating elemets ensure uniform temperature ensure uniform temperature
• Shimaden PID temperature controller with programmable 30 segments
• SS304 vacuum sealing flanges with valves and pressure meter included
• Dual flanges support provides better sealing and longer tube life
• Long life type B thermocouple
• CE certified, standard

Ramping, Dwelling, Cooling Curves for 1700 Series Tube Furnaces

Safety Measures

• Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
• Overheat protection shuts down the tube furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions
• Power failure protection resumes furnace operation right after the point of failure when power is reestablished
• Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot

Technical Specifications

Application Notes

• Don't fill any explosive gasses such as Hydrogen or Methane into the furnace tube without necessary safety controls and supervision
• 1700C tube furnaces with alumina tube are designed for use under vacuum and low pressure; 0.2 bars / 3 psi / 0.02 MPa
• To minimize the cracking rate of the ceramic tubes, please change the position (mark four points on the tube) each batch
• Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating

Size Comparison